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Nanofabrication Technologies

Unit Code: HES6124




Duration

Contact Hours

Campus

Prerequisite

Corequisite


12 weeks

36 hours

Hawthorn


Nil   


Nil

Credit Points: 12.5 Credit Points


Related Course/s:

 
and an elective unit of study in:

Aims & Objectives:

This unit will assist the student in attaining a basic understanding of the complete sequence in the nanofabrication process from design through to fabricated structure including basic metrology and characterization.

After successfully completing this course, the student should be able to:
  • Bring awareness of a variety of nanofabrication techniques (e.g. nanolithography, self assembled monolayers, replica molding etc.) 
  • Develop an understanding on the limitation of conventional microtechnologies in the context of nanofabrication 
  • Gain advanced knowledge in novel nanostructures (e.g. carbon nanotubes, Nanowires, nano porous structures etc) 
  • Apply the knowledge and skills in nanostructures in development of new nano devices 
  • Evaluate the importance of nanocharacterization methods and their selection rules for a given application.

Teaching Methods:

Lectures

Assessment:

Written Exam (worth 20%)
Assignments (worth 40%)
Project (worth 40%)

Generic Skills Outcomes:

Specific Swinburne generic attributes, which will be expected to be enhanced are that the students:
  • Are informed and knowledgeable in the area.
  • Have pertinent skills and abilities
  • Have the ability to work both independently and collaboratively.
  • Have the ability to effectively communicate using a range of media and in varied contexts.
  • Are self driven learners.

Content:

  • Types of Polymers used in nano-fabrication 
  • Nanolithography Fundamentals. 
  • Limitations of Microlithography, Need for new technologies, 
  • Elements of soft lithography – self assembled monolayers, e-beam and focused ion beam writing, micro contact printing and Micro transfer molding. 
  • Nano replication and manufacturing technologies, rapid prototyping 
  • Characterization of nano structures – STM/AFM, Surface Raman Scattering, wettability (contact angle) measurements, small angle x-ray diffraction and electron diffraction 
  • Nano carbon tubes, Nano wires, Nano materials, nanoparticles, solgels, and applications. 
  • Nano devices and applications

References:


1. M. Gentili, C. Giovannella, S. Selci (Editor) Nanolithography: A Borderland Between Stm, Eb, Ib, and X-Ray Lithographies (NATO Asi Series. Series E: Applied Sciences, Vol 264), 1994, Kluwer Academic Publishers
2. Harvey C. Hoch, Lynn W. Jelinski, Harold G. Craighead (Ed.),Nano fabrication and biosystems: integrating materials science, engineering, and biology. Cambridge ; New York, NY, USA : Cambridge University Press, 1996
3. Poole Charles P., Introduction to Nanotechnology, Hoboken, NJ: John Wiley, 2003
4. Microfabrication and nano- manufacturing edited by Mark J Jackson Taylor& Francis 2006
5. Nano-fabrication fundamental and applications Amere A Tseng world Scientific 2008
6. Microlithography, Micromachining and Microfabrication–P. Rai-Choudhury
7. Introduction to Microlithography–L.F. Thompson, C.G. Willson and M.J. Bowden